Li-sensor tsa khatello ea semiconductor li ka aroloa ka mekhahlelo e 'meli, e' ngoe e itšetlehile ka molao-motheo oa hore I-υ litšobotsi tsa semiconductor PN junction (kapa schottky junction) li fetoha tlas'a khatello ea kelello. Ts'ebetso ea ntho ena e nang le khatello ea maikutlo e tsitsitse haholo ebile ha e so ntlafatsoe haholo. E 'ngoe ke sensor e thehiloeng ho semiconductor piezoresistive effect, e leng mofuta o ka sehloohong oa sensor ea khatello ea semiconductor. Matsatsing a pele, li-gauge tsa semiconductor strain hangata li ne li hokeletsoe linthong tse rekerehang ho etsa lisebelisoa tse fapaneng tsa ho lekanya khatello ea maikutlo le khatello. Lilemong tsa bo-1960, ka nts'etsopele ea theknoloji ea potoloho e kopantsoeng ea semiconductor, sensor ea khatello ea semiconductor e nang le "diffusion resistor" ha piezoresistive element e hlaha. Mofuta ona oa sensor ea khatello e na le sebopeho se bonolo le se ka tšeptjoang, ha ho na likarolo tse tsamaeang, 'me ntho e nang le khatello ea maikutlo le ntho e reketlang ea sensor e kopantsoe, e qobang ho lag le ho thella le ho ntlafatsa ts'ebetso ea sensor.

Piezoresistive effect ea semiconductor Semiconductor e na le tšobotsi e amanang le matla a ka ntle, ke hore, resistivity (e emeloang ke letšoao ρ) e fetoha le khatello ea maikutlo eo e nang le eona, e bitsoang piezoresistive effect. Phetoho e lekanyelitsoeng ea ho hanyetsa tlas'a ketso ea khatello ea unit e bitsoa piezoresistive coefficient, e hlahisoang ke letšoao π. E hlalositsoe ka lipalo joalo ka ρ/ρ = π σ.

Moo σ e emelang khatello ea maikutlo. Phetoho ea boleng ba ho hanyetsa (R / R) e bakoang ke ho hanyetsa ha semiconductor tlas'a khatello ea kelello haholo-holo e khethoa ke phetoho ea ho hanyetsa, kahoo polelo ea phello ea piezoresistive e ka boela ea ngoloa e le R / R = πσ.

Tlas'a ketso ea matla a kantle, khatello e itseng (σ) le strain (ε) li hlahisoa ka likristale tsa semiconductor, 'me kamano pakeng tsa tsona e khethoa ke Young's modulus (Y) ea thepa, ke hore, Y=σ/ε.

Haeba phello ea piezoresistive e bontšoa ke khatello ea semiconductor, ke R/R=Gε.

G e bitsoa sensitivity factor ea sensor ea khatello, e emelang phetoho e lekanyelitsoeng ea boleng ba khanyetso tlas'a khatello ea unit.

Piezoresistive coefficient kapa sensitivity factor ke karolo ea mantlha ea 'mele ea phello ea semiconductor piezoresistive. Kamano e teng pakeng tsa bona, joalo ka kamano pakeng tsa khatello ea maikutlo le khatello ea maikutlo, e khethoa ke modulus oa Young oa thepa, ke hore, g = π y.

Ka lebaka la anisotropy ea likristale tsa semiconductor ka elasticity, Young's modulus le piezoresistive coefficient coefficient change with crystal orientation. Boholo ba phello ea semiconductor piezoresistive e boetse e amana haufi-ufi le ho hanyetsa ha semiconductor. Ho theosa le ho hanyetsa, ho fokotseha ho fokolang. Phello ea piezoresistive ea ho hanyetsa karohano e khethoa ke chebahalo ea kristale le mahloriso a litšila a ho hanyetsa ho ata. Boiketlo ba ho se hloeke haholo-holo bo bua ka bokaholimo ba litšila ba lera le phatlalalitsoeng.