E sebetsa ho Passat peterole e tloaelehileng ea khatello ea terene 06E906051K

1. Mokhoa oa ho theha sensor ea khatello, e kenyelletsang:

Ho fana ka substrate ea semiconductor, moo karolo ea pele ea dielectric ea interlayer, lesela la pele la dielectric la interlayer le karolo ea bobeli ea dielectric ea interlayer e thehoa holim'a semiconductor substrate.

Letlapa le ka tlase la eleketrode lera la pele la dielectric la interlayer, eleketrode ea pele e kopanetsoeng e lutseng holim'a lera le lekanang le poleiti ea elektrode e tlase 'me e arohane.

Ho kopanya lihlopha;

Ho etsa lera la sehlabelo ka holim'a poleiti e tlaase ea polar;

Ho theha poleiti e ka holimo ea elektrode holim'a lera la pele la dielectric interlayer, lera la pele la khokahanyo le lera la sehlabelo;

Ka mor'a ho etsa lesela la sehlabelo le pele ho etsoa poleiti e ka holimo, karolong ea pele ea ho kopanya

Ho theha groove ea khokahanyo, le ho tlatsa groove ea khokahanyo ka poleiti e ka holimo ho hokahanya ka motlakase le lera la pele la khokahanyo; Kapa,

Ka mor'a ho etsa poleiti ea elektrode e ka holimo, li-grooves tse kopanyang li thehoa ka holim'a poleiti e ka holimo ea elektrode le lera la pele la khokahanyo, e leng.

Ho etsa lera conductive ho hokahanya e ka holimo eleketrode poleiti le pele interconnection lera ka kgokelo groove;

Ka mor'a hore motlakase o hokahane le poleiti e ka holimo le lera la pele la khokahanyo, ho tlosa lera la sehlabelo ho etsa sekoti.

2. Mokhoa oa ho theha sensor ea khatello ho latela tseko ea 1, eo ho eona lera la pele

Mokhoa oa ho etsa lera la sehlabelo holim'a lera la dielectric la interlayer o na le mehato e latelang:

Ho beha lera la thepa ea sehlabelo holim'a lera la pele la dielectric interlayer;

Ho etsa mohlala oa lera la lintho tsa sehlabelo ho etsa lera la sehlabelo.

3. Mokhoa oa ho etsa mochine oa khatello ho latela 2, moo photolithography le engraving e sebelisoang.

Lera la thepa ea sehlabelo le entsoe ka mokhoa oa etching.

4. Mokhoa oa ho theha sensor ea khatello ho latela tseko ea 3, moo ho nang le lera la sehlabelo

Thepa ke amorphous carbon kapa germanium.

5. Mokhoa oa ho theha sensor ea khatello ho latela tseko ea 4, moo ho nang le lera la sehlabelo

Thepa ke k'habone ea amorphous;

Likhase tse etching tse sebelisoang molemong oa ho kenya lera la lintho tsa sehlabelo li kenyelletsa O2, CO, N2 le Ar;

Mekhahlelo ea ts'ebetso ea ho kenyelletsa lera la thepa ea sehlabelo ke: phallo ea phallo ea O2 ke 18 SCCM ~ 22 SCCM, 'me tekanyo ea phallo ea CO ke 10%.

Sekhahla sa phallo se tloha ho 90 SCCM ho ea ho 110 SCCM, tekanyo ea phallo ea N2 e tloha ho 90 SCCM ho ea ho 110 SCCM, le tekanyo ea phallo ea Ar.

Mefuta e fapaneng ke 90 SCCM ~ 110 SCCM, sebaka sa khatello ke 90 mtor ~ 110 mtor, 'me matla a leeme ke

540w ~ 660w.