Sebopeho sa Sensor ea Piezoresistive

Ka kutlo ena, mochini o hanyetsang o kopantsoe holim'a monocrystalline silicon diaphragm ka mokhoa oa ho kopanya ho etsa silicon piezoresistive chip, 'me karolo ea chip ena e kenngoa ka mokhoa o tsitsitseng ka har'a khetla,' me li-electrode lead li ntšoa. Piezoresistive pressure sensor, eo hape e tsejoang e le solid-state pressure sensor, e fapane le gauge ea sekhomaretsi, e hlokang ho utloa matla a kantle ka tsela e sa tobang ka likarolo tse bobebe, empa ka kotloloho e utloa khatello e lekantsoeng ka silicon diaphragm.

Lehlakore le leng la silicon diaphragm ke sekoti sa khatello e phahameng se buisanang le khatello e lekantsoeng, 'me lehlakore le leng ke sebaka sa khatello e tlase se buisanang le sepakapaka. Ka kakaretso, silicon diaphragm e entsoe e le selikalikoe se nang le periphery e tsitsitseng, 'me karo-karolelano ea bophara ho botenya e ka bang 20 ~ 60. Li-strip tse 'nè tsa ho hanyetsa litšila tsa P li arotsoe sebakeng sa silicon diaphragm e chitja' me li kopantsoe ka borokho bo feletseng, tse peli tsa tsona. li sebakeng sa khatello ea maikutlo 'me tse ling tse peli li sebakeng sa khatello ea maikutlo, tse nang le symmetrical mabapi le bohareng ba diaphragm.

Ntle le moo, ho boetse ho na le square silicon diaphragm le silicon column sensor. Sensor ea silicon cylindrical e boetse e entsoe ka likhoele tse hanyetsang ka ho hasana ka lehlakoreng le itseng la sefofane sa kristale sa silindara ea silicon, 'me likhoele tse peli tse thibelang khatello ea maikutlo le likhoele tse peli tse thibelang khatello li etsa borokho bo felletseng.

Sensor ea piezoresistive ke sesebelisoa se entsoeng ka ho hanyetsa karohano holim'a substrate ea thepa ea semiconductor ho latela phello ea piezoresistive ea thepa ea semiconductor. Substrate ea eona e ka sebelisoa ka ho toba e le sensor ea ho lekanya, 'me ho hanyetsa ho hasana ho kopantsoe ka substrate ka mokhoa oa borokho.

Ha substrate e holofatsoa ke matla a kantle, litekanyetso tsa ho hanyetsa li tla fetoha 'me borokho bo tla hlahisa tlhahiso e tšoanang e sa leka-lekaneng. Li-substrates (kapa li-diaphragm) tse sebelisoang e le li-sensor tsa piezoresistive haholo-holo li-wafers tsa silicon le li-wafers tsa germanium. Li-sensor tsa Silicon piezoresistive tse entsoeng ka li-wafers tsa silicon joalo ka lisebelisoa tse bobebe li hohetse tlhokomelo e eketsehileng, haholo-holo li-sensor tse tiileng tsa boemo ba piezoresistive bakeng sa ho lekanya khatello le lebelo ke tsona tse sebelisoang haholo.